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Series of articles on MayAir FFU application | The Environment of Chip Manufacturing and Process Yield Rate

  • Time of issue:2021-09-29

(Summary description)The COVID-19 Delta pandemic is tapering as autumn gradually rolls in. We continue to work tenaciously, and the good news is it is bearing fruits as we begin to secure many projects that we have bid on.

Series of articles on MayAir FFU application | The Environment of Chip Manufacturing and Process Yield Rate

(Summary description)The COVID-19 Delta pandemic is tapering as autumn gradually rolls in. We continue to work tenaciously, and the good news is it is bearing fruits as we begin to secure many projects that we have bid on.

  • Categories:Application
  • Author:
  • Origin:
  • Time of issue:2021-09-29 23:25
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Information

The COVID-19 Delta pandemic is tapering as autumn gradually rolls in. We continue to work tenaciously, and the good news is it is bearing fruits as we begin to secure many projects that we have bid on.

Sharing today: Another good news came from the cleanroom business department. With competitive products, innovative technologies, and a complete range of services, MayAir will provide our FFU product for Hua Hong Integrated Circuit Company Ltd’s innovation centre.

 

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Another Bid Won

China is ramping up its efforts to build innovative integrated circuits and promote the rapid development of the integrated circuit industry to boost its home-grown key technologies and close the technology advancement gap with its competitors.

In key technologies and those which are still lagging behind China’s competitors “stuck neck” fields, China is making every effort to build innovative integrated circuits and promote the rapid development of the integrated circuit industry.] The 14 and 28-nanometer advanced processes have achieved mass production, respectively. SMIC and Huahong Group are the leading companies in the country in the domestic chip industry. MayAir is honoured to provide support services to these two leading semiconductor companies, where it provides terminal cleaning equipment.

 

In the field of key core technologies and "stuck necks", China is making every effort to create an integrated circuit innovation highland and the rapid development of the integrated circuit industry. In the field of chip manufacturing, SMIC and Hua Hong Group rank among the top two in China in terms of annual sales, 14 advanced technologies of nanometer and 28 nanometers have been mass-produced respectively. MayAir is fortunate to provide supporting services for leading companies in the domestic chip industry and provide end-of-line clean equipment.

 

“Planning and perseverance will bring your mission to fruition.” ― Rob Liano

A cleanroom environment directly affects the yield of the chip manufacturing process.

Manufacturing chips requires hundreds of steps, and it involves strictly controlled temperature and air cleanliness throughout the process. In a cleanroom environment, the wafers are processed where they are continuously circulated through various mechanical equipment. The chips are assembled under a strict manufacturing process and dust-free environment. As we all know, the air is full of small and invisible dust to the naked eye. However, if these specks of dust are found in the environment where chips are produced, they will be large particles compared to the size of each transistor. During the process, if dust or pollutants fall on the wafer, it will cause a short circuit and the burning of the chip.

Therefore, to ensure the high yield of the chip, it is necessary to protect its high production environment and cleanliness!

What role does FFU play in a clean room?

The full name of FFU: Fan Filter Unit (FFU) is the terminal of the cleanroom system, which comprises high-efficiency filters or ultra-high-efficiency filters, fans, housings and other components. It is used in turbulent and laminar flow cleanrooms.

The cleaning method of FFU: is used in cleanrooms to achieve air cleanliness levels between ISO1-ISO8. The air is blown into the cleanroom by the FFU from the technical interlayer on the cleanroom. Meanwhile, the circulating air is sent back to the technical interlayer through the return air channel.

FFU conventional design: Various materials are available to be used as its body. These materials include galvanized steel sheets, stainless steel sheets & aluminum sheets.

 

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FFU conventional design: a variety of body materials are available, galvanized steel plate & stainless-steel plate & aluminum plate.

 

On-site installation

FFU product features:

 

FAN FILTER UNIT(FFU)

Product Features

Energy saved

Low noise

High efficiency

Easy to install

FFU control system

Long lasting

FFU control system: [manual five-speed regulation, manual step-less speed regulation, multi-unit group control, multi-unit touch screen control] and FLONET management system. MayAir group control system has strong compatibility, is easy to operate, and has over 10,000 units of group control experience in other customer applications, helps the customers to manage the status of products in operation more effectively, and provides timely feedback and reaction.

AC EC Control System

 

AC EC Control System

It controls multi FFUs through a single controller, which can control the start-stop, rotation speed regulation for multi FFU or a unit FFU, and come with a single unit fault alarm and LED display functions.

AC EC Control System

EC Controller

It controls multi FFUs through a single controller, which can control the start-stop, rotation speed regulation for multi FFU or a unit FFU, and come with a single unit fault alarm and LED display functions.

Single manual five-gear and stepless speed regulation

FFU group controller

Power Indicator Fault Indicator

group control system

Group control system

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Multiple FFU group control cabinet

Multiple FFU group control cabinet

Reliable AC FFU control system, group or single alarm light; three-speed or five-speed variable pressure wind speed controller; current overload protection, leakage protection;

Remote monitoring is possible through the 485 communication mode according to the needs.

Multi FFU touch screen control

 

Multiple FFU touch screen control

ADAM6017: BA1, 2Do, 8-channel analogue input, can be connected to temperature and other signals, 2-channel digital output, can be used for switch on control;

ADAM6050: 12Di, 6Do, 12-channel Di can be connected to switch input, such as fire signal, 6Do, 12-channel Di can be used as switch input control;

MayAir FLONET group control management system

MayAir FLONET

 

MayAir FLONET Group Control Management System

 

Online monitoring of FFU group control system

 

FFU group control system online monitoring

 

Purification Products and Clean Environment Complement Each Other

With the rapid development of the modern semiconductor industry, the requirements for the air cleanliness level of the cleanroom will increase. MayAir has 20 years of experience in the high-level purification field. The FFU system can meet the ISO1-IS08 air cleanliness standards of cleanroom as it leverages the maturity of high-efficiency filter and ultra-high-efficiency filter technology. The improved FFU system theory, accumulated practical application experience, combined with the strict production process quality requirements imposed contributed to meeting the standards. It also provides a clearer direction for future cleanroom upgrades.

Purification products coupled with a clean environment complement each other to produce good quality products. MayAir is striving to continuously contribute to the cleanroom cleaning industry.

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