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Extreme process environment requirements of semiconductor cutting-edge technology

The typical application scenario of the company’s core product for cleanroom are FFU and air filters. With the reduction of the key line width of semiconductor chips, the continuous improvement and iteration of process technology, and constantly put forward the most demanding requirements of air filtration technology.

企业服务

Semiconductor Line Width

企业服务

Nano process requires cleanliness ISO Class 1

企业服务

Circuit corrosion caused by “acid” gas

企业服务

T-topping problem caused by “alkaline” gas

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The large-scale application of MayAir FFU witnesses the growth of China’s semiconductor industry

Technical features: low noise, high efficiency, low energy consumption, group control system, long service life.

美埃(中国)环境科技股份有限公司

FFU

美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司

EFU

美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司

Control technology of gaseous molecular pollutants helps improve semiconductor yield

With the reduction of key line width dimensions of semiconductor chips and continuous improvement and iteration of process technology, the control technology of gaseous molecular pollutants AMC (Airborne Molecular Contamination) has become a necessary means for improving semiconductor yield. Since 2005, MayAir’s Gaseous Filtration Solutions has been committed to serving wafer foundry in mainland China. In addition to providing customers with chemical filter products, Nanjing R&D center has set up a chemical laboratory to carry out inspection test for each stage from raw materials to completed products. Once the products are delivered to customer, samples are taken to verify the concentration after installation meets the application requirements, return visits and tests regularly.

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FFU用板式离子交换纤维化学过滤器Puro-F

Panel type ion exchange fiber chemical filter Puro-F

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Panel type modified activated carbon chemical filter Puro-P

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Box type activated carbon chemical filter Puro-C

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Single flange V-type ion exchange fiber chemical filter Puro-V

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Carbon cartridge chemical filter CT

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Non flange ion exchange resin chemical filter Puro-V

MayAir and China’s semiconductor industry grow together

Job references

业务范围

SMIC (Shanghai) 14nm process announced that the yield has reached the industry mass production level

业务范围

Chongqing HKC 8.6 generation Ultra HD display device line announced the yield rate of 98.5%

业务范围

Shanghai Microelectronics Lithography Equipment of cleanliness ISO Class 1

业务范围

TCL G11 project won LEED platinum certification

业务范围

MayAir is the first supplier that BOE chooses to replace foreign brands

业务范围

HuaHong’s self-developed breakthrough 28 nanometers refer to 14 nanometer

Large-scale high-speed group control system

Monitoring > 100,000 FFU | Remote fault feedback < 8 seconds | Compatible with AC and DC fans | Compatible with multiple communication protocols | Automatic configuration technology | Wireless control technology | Optimized vector pulse width modulation low harmonic technology

美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司
美埃(中国)环境科技股份有限公司

CFD simulation

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Promote the development of purification industry and improve global air quality

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